BUSINESS AREA

  • BUSINESS AREA

    • LED用
      Susceptor 事业

    • 高纯度
      SiC 粉末事业

    • 半导体用部品素材
      SiC 镀膜事业

    • 碳复合体及产业用
      部品SiC 镀膜事业

    • SiC 镀膜设备事业

  • Applications
    • - APCVD wafer carrier
    • - PECVD wafer tray and disk boat
    • - Ion Implanter parts
    • - ITO injector tube
    • - Quarts alternative parts
    • - Bonding fixtures & Sputtering target
    • - Glass to metal sealing jig
    • - MOCVD susceptor
    • - E-beam crucible
    • - I.C. package sealing jig
    • - Plasma Etch electrode
    • - Ball Mount kit Implantation
    • - Heater
    • - Sealing plate
  • 研究开发 R&D