PRODUCTS
SiC Coating Specialist

  • Properties of SiC
    • Physical properties
      Thermal Conductivity(W/mK) 190
      Poissons Ratio 0.17
      Bending Strength(MPa) >240
      Compressive Strength(MPa) 1600
      Purity(%) >99.9(CVD>6N)
      Bulk Density(g/cm*) >2.93
      Youngs Modulus(GPa) 340
      Load0.5Kg HV1=9.807N Vickers Hardness(GPa) 22
      Thermal Expansion(x10-6/℃) 25~400℃:3.8
      25~800℃:4.6
      volume Resistivity(Ω . ㎝) 10-1
      Specific Heat([PT]J/Kg.K) 0.7
  • POSSESS THCHNOLOGY PROCESS
    SiC Coating Technology
    • - (Tech 1. – CVIR ): SiC layer located inside of graphite
    • - (Tech 2. – CVD ): SiC layer located on the graphite
    • - (Tech 3. – Hybrid ): Complexed SiC layer located inside and on the graphite
  • Strong Point

    • Cost

      • - All of graphite can be coated by SiC

    • Productivity

      • - No need post-machining to meet high precision
      • - More Short coating time

    • Diversity

      • - Here are many various material can be coated by SiC (Graphite, Carbon-Carbon Composite, RBSiC,…)
      • - Complex parts can be coated by SiC
  • Applications

    • Wafer Carrier(susceptor)

    • High precision graphite heater

    • SEMICON graphite parts

    • Carbon Composite

    • SEMICON SiC Ring

  • PROCESS

    STEP 01

    Preparing Graphite (Japan Graphite)

    STEP 02

    Machining

    STEP 03

    High purification

    STEP 04

    SiC Coating

    STEP 05

    3D Measure

    STEP 06

    Packing