BUSINESS AREA

  • BUSINESS AREA

    • Susceptor business
      for LED

    • High purity
      SiC powder business

    • Semiconductor parts/
      material SiC coating
      business

    • Carbon composite and
      industrial parts
      SiC coating business

    • SiC coating equipment
      business

  • Applications
    • - APCVD wafer carrier
    • - PECVD wafer tray and disk boat
    • - Ion Implanter parts
    • - ITO injector tube
    • - Quarts alternative parts
    • - Bonding fixtures & Sputtering target
    • - Glass to metal sealing jig
    • - MOCVD susceptor
    • - E-beam crucible
    • - I.C. package sealing jig
    • - Plasma Etch electrode
    • - Ball Mount kit Implantation
    • - Heater
    • - Sealing plate
  • R&D